Test gratings for calibration of SPM scanners, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip aspect ratio, calibration in X,Y,and Z directions, tip characterization.

2-Dimensional Tip Characterization Grating 

Description

The TGG01 series of silicon calibration gratings is a 1-D array of triangular steps having precise linear and angular dimensions defined by the crystallography of Silicon (<111> plane) and maintained with high accuracy. The edges of the triangular steps have curvature radii less than 10nm.

Active area 3 x 3 mm Edge curvature radii less than 10 nm Pitch 3.0 µm ± 5nm Chip dimensions 5 x 5 x 0.45 mm Note: the dimension marked * is given for information only.

Application Notes

You can use TGG01 grating for 2-D tip characterization in contact mode, especially for cantilevers with high force constant. The triangular steps of TGG01 grating are much more robust than the spikes of TGT01.

The TGG01 calibration grating is also applicable for:

• lateral calibration of SPM scanners;
• detection of lateral and vertical scanner nonlinearity;
• detection of angular distortions.

For accurate quantification of images of TGG01 calibration grating, we recommend you to use Scanning Probe Image Processor (SPIP) designed by Image Metrology.

Fig.1 SEM image of TGG01 grating

Fig.2 20x20µm image of TGG01 grating

Calibration grating of the TGG01 series is also included in TGS02 set

Gratings for lateral calibration of SPM

Description

Silicon calibration grating of the TGX series is a chessboard-like array of square pillars with sharp undercut edges formed by (110) crystallographic planes of silicon.

The draft of TGX01 grating.	Part # TGX01 TGX11 Step Height* 1 µm 2 µm Pitch 3.0 µm 10.0 µm Pitch accuracy** ±0,25% Active area 2 x 2 mm Edge curvature radii less than 5 nm Chip dimensions 5 x 5 x 0.45 mm * the value is given for information only ** according to DFM certificate N0301

The pitch of TGX01 grating is certified at Danish Institute of Fundamental Metrology (DFM certificate number N0301). Phoenix NTguarantees the pitch uncertainty of TGX01 gratings within ±8 nm range. Every grating can be certified individually in DFM at extra cost. Direct your requests to info@nano-tips.com, please.

Application Notes

TGX calibration gratings are intended for lateral calibration of SPM scanners. You can also use the gratings for:

• detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
• determination of the tip aspect ratio.

For accurate quantification of images of calibration gratings of TGX series we recommend you to use Scanning Probe Image Processor (SPIP) designed by Image Metrology.

An example of lateral non-linearity correction by calibration grating of the TGX01 series is shown in Fig. 2 and 3.

Fig.1 SEM image of TGX01 grating.

Fig.2 20x20µm image of TGX01 grating before the correction of nonlinearity

Fig.3 20x20µm image of TGX01 grating after the software correction of nonlinearity

Calibration grating of the TGX01 series is also included in TGS02 set.

TGZ series for vertical SPM calibration

Description

Calibration gratings of the TGZ series are 1-D arrays of rectangular SiO₂ steps on a Si wafer. The structure is coated by Si₃N₄ to prevent Si from oxidation. The step height value is calibrated over the whole active area.

Actual step height, shown in the individual specifications, may slightly differ from the nominal value. Step height accuracy is a standard deviation calculated over the whole active area. It shows deviation from the actual (not nominal) step height value.

The TGZ01, TGZ02, and TGZ03 gratings are also contained in the TGS01 and TGS02 sets. NIST traceable TGZ01, TGZ02, and TGZ03 gratings are available in TGS01C and TGS02C sets only.

Fig. 1 Schematic of TGZ series gratings.

Part number Step height range* Pitch* TGZ01 18 .. 26 ± 1.0 nm 3.0 µm TGZ02 98 .. 104 ± 2 nm 3.0 µm TGZ03 496 .. 503 nm ± 6nm 3.0 µm TGZ04 1000 nm ± 25nm 3.0 µm TGZ11 1350 nm ± 30nm 10.0 µm *Pitch value may differ from actual one Active area 3 x 3 mm (all models) Chip dimensions 5 x 5 x 0.45 mm (all models)

Application Notes

TGZ calibration gratings are intended for vertical calibration of SPM scanners. Using several calibration gratings with different nominal step height you can compensate for vertical non-linearity.

For accurate quantification of images of calibration grating of TGZ series, we recommend you to use Scanning Probe Image Processor (SPIP) designed by Image Metrology, the Calibration option.

NIST certification and calibration

There are TGZ01, TGZ02, and TGZ03 NIST traceable gratings, which are individually controlled and certified. The height of the steps is measured with an AFM calibrated using the Step Height Reference Standards. The reference standards are three samples of ULTRASHARP gratings that were measured and certified by NIST (NIST Reports 821/261141-99 and 821/265166-01). Measurement and calibration techniques are based on NIST modified ISO step height determination algorithm (ISO5436).

Fig. 2 SEM image of TGZ02 grating

Fig. 3 NIST Traceability

Calibration gratings of the TGZ01, TGZ02, and TGZ03 series are also included in TGS01 and TGS02 sets. NIST traceable calibration gratings of the TGZ01, TGZ02, and TGZ03 series are available in TGS01C and TGS02C sets.

TGF11 grating for lateral force calibration

Description

The TGF11  series of silicon calibration gratings is a 1-D array of trapezoidal steps with a 10 µm pitch and height of approximately 1.75 µm (Fig.1). The lateral faces of the steps have an inclination angle with respect to the horizontal plane of precisely arctan sqrt(2)=54.72°. This angle is defined by the crystallography of silicon and is maintained with high accuracy.

Active area 3 x 3 mm array Edge angle 54° 44' Pitch 10 µm ± 5nm Chip dimensions 5 x 5 x 0.45 mm Note: the dimension marked * is given for information only.

Application Notes

TGF11 grating is intended for lateral force calibration in atomic force microscopy. You can use this grating for calibration of conventional Si probes, and cantilevers with attached colloidal particle with any radius of curvature up to 2 µm. Direct calibration of the lateral force can be obtained by analyzing the contact response measured on flat and sloped facets. This method has been described by M. Varenberg, I. Etsion and G Halperin in Rev. Sci. Instrum., 74 (2003) 3362-3367.

Fig.1 SEM image of TGF11 grating

The discount structure is:

5 - 7 packs = 5%, 8 or more packs = 10% discount.